etch uniformity

基本解釋

Is the etch uniformity monitored at least monthly and records maintained as a quality document?
是否至少定期稽核一次蝕刻站并有相應的維護記錄作為品質文件？
In order to improve the uniformity of the thin film of silicon, the interface of hetero-junction of SOI material was used as the interface of etch self-stopping.
為了提高電容式觸覺傳感陣列的性能，本工作以SOI材料中異質結界面作為深槽腐蝕中腐蝕自停止界面，以提高硅膜片的表面平整度和厚度均勻性。
It is proved that the uniformity of etch rate can be improved and the effect of micro load can be decreased by adjusting the value of chamber pressure, gas flow rate and RF power properly.
結果表明，通過對反應室壓力、刻蝕氣體流量和射頻功率的調(diào)節(jié)，可以降低微負載效應的影響，得到良好的刻蝕均勻性。