microwave plasma device

基本解釋

In this study, the microwave plasma device is designed to excite and maintain stable plasma on atmospheric press.
本研究設(shè)計了一套微波等離子體反應(yīng)器，在大氣壓下激發(fā)并維持穩(wěn)定的等離子體。
A microwave plasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.
本發(fā)明提供能夠在處理基體上形成均勻的薄膜的微波等離子體處理裝置和氣體供給構(gòu)件。
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The linearly coaxially coupled microwave plasma CVD device is a new microwave plasma CVD device bringing an axial extended plasma cylinder through a microwave antenna.
線形同軸耦合式微波等離子體CVD裝置是一種利用微波天線產(chǎn)生軸向分布的等離子體柱的新型微波等離子體CVD裝置。